1. The laboratory generally requires two rooms. The ICP room is 8-15 square meters. This room can be equipped with precision instruments that are afraid of acid corrosion. Chemical treatment requires a room. Generally, there are no certain requirements based on the size of the substrate, but it is required to have water supply and drainage, power cords connected to electric furnaces or hot plates, test benches, and fume hoods.
Air conditioner: When ICP works, the room temperature requires 20°C-28°C, so in general, the room needs to be equipped with air conditioner. If the room is less than 15 square meters, it can be equipped with 1 HP air conditioner. If the room is heated in winter or the room temperature does not exceed 28 C° in summer No air conditioning
2. There must be a good electrical environment. The power of the ICP is still very large at the moment of ignition, so the power supply should not be less than 10 kilowatts, and the laboratory should be powered separately, especially for enterprises, not to share with other high-power production equipment Power supply, because other high-power devices will have a greater impact on the instrument test when starting, and even damage the instrument. The voltage must be relatively stable, and the frequency must be stable. You can use an oscilloscope to monitor it. It must have a good sine wave, and no pulse or square wave. It is best to have a stabilized power supply, and consult the manufacturer about the type of stabilized power supply. Not every regulated power supply can be used.
3. Single-phase 220V power supply, 32A. In order to make the instrument have a stable input power, it is required to separate copper-plastic wires of not less than 4 square meters from the power distribution room (at least one line for large electrical appliances such as motors). It is connected to the 32A circuit breaker (as the main switch), and other equipments such as ICP, air conditioner, and water tank (the power is the same as that of air conditioner), exhaust air, computers, printers, etc. are supplied.
CHINSE